Wafer producing method and wafer producing apparatus

ABSTRACT

A method for producing a wafer from a hexagonal single crystal ingot includes: planarizing an upper surface of the hexagonal single crystal ingot; applying a laser beam of such a wavelength as to be transmitted through the ingot, with a focal point positioned in an inside of a region not to be formed with devices of a wafer to be produced from the upper surface of the ingot which has been planarized, to form a production history; and applying a laser beam of such a wavelength as to be transmitted through the hexagonal single crystal ingot with a focal point of the laser beam positioned at a depth corresponding to a thickness of the wafer to be produced from the upper surface of the hexagonal single crystal ingot which has been planarized, to form an exfoliation layer.

This is a divisional application of application Ser. No. 16/192,250,filed Nov. 15, 2018, which claims the benefit of Japanese PatentApplication No. 2017-221073, filed Nov. 16, 2017.

BACKGROUND OF THE INVENTION Field of the Invention

The present invention relates to a wafer producing method and a waferproducing apparatus for producing a wafer from a hexagonal singlecrystal ingot.

Description of the Related Art

Devices such as integrated circuits (ICs), large scale integrations(LSIs) and light-emitting diodes (LEDs) are formed by forming afunctional layer on a front side of a wafer formed from Si (silicon),Al₂O₃ (sapphire) or the like and partitioning the functional layer by aplurality of intersecting division lines (streets). In addition, devicessuch as power devices and LEDs are formed by forming a functional layeron a front side of a wafer formed from single crystal SiC (siliconcarbide) and partitioning the functional layer by a plurality ofintersecting division lines. The wafer formed with the devices isdivided into individual device chips by processing along the divisionlines by a cutting apparatus or a laser processing apparatus, and thethus divided device chips are used for electric apparatuses such asmobile phones and personal computers.

The wafer to be formed with the devices is generally produced by thinlycutting a cylindrical semiconductor ingot by a wire saw. The front sideand the back side of the wafer thus cut are mirror finished by polishing(see, for example, Japanese Patent Laid-Open No. 2000-94221). When thesemiconductor ingot is cut by a wire saw and the front side and the backside of the cut wafers are polished, however, most part (70% to 80%) ofthe semiconductor ingot is discarded, which is uneconomical.Particularly, a hexagonal single crystal SiC ingot is high in hardnessand is difficult to cut by a wire saw, so that a considerable time istaken for cutting and productivity is therefore poor. In addition, thehexagonal single crystal SiC ingot is high in unit cost, and has aproblem as to efficient wafer production.

In view of the foregoing, there has been proposed a technology wherein alaser beam of such a wavelength as to be transmitted through thehexagonal single crystal SiC is applied to a hexagonal single crystalSiC ingot, with a focal point of the laser beam positioned in the insideof the hexagonal single crystal SiC ingot, to form an exfoliation layerat a cutting plane, and a wafer is exfoliated from the hexagonal singlecrystal SiC ingot along the cutting plane where the exfoliation layer isformed (see, for example, Japanese Patent Laid-Open No. 2013-49161).

SUMMARY OF THE INVENTION

However, the history of the wafer produced from the hexagonal singlecrystal SiC ingot is not necessarily clear. When a defect is generatedin a device in the process of formation of the wafer with devices,therefore, it is impossible to trace back the history of the wafer andinvestigate the cause of the defect in the device.

It is therefore an object of the present invention to provide a waferproducing method and a wafer producing apparatus by which a history of awafer can be left in the wafer.

In accordance with an aspect of the present invention, there is provideda wafer producing method for producing a wafer from a hexagonal singlecrystal ingot. The wafer producing method includes: a planarization stepof planarizing an upper surface of the hexagonal single crystal ingot; afirst production history forming step of applying a laser beam of such awavelength as to be transmitted through the hexagonal single crystalingot to the hexagonal single crystal ingot, with a focal point of thelaser beam positioned in an inside of a region not to be formed withdevices of a wafer to be produced secondly, from the upper surface ofthe hexagonal single crystal ingot which has been planarized, to form aproduction history; an exfoliation layer forming step of applying alaser beam of such a wavelength as to be transmitted through thehexagonal single crystal ingot to the hexagonal single crystal ingot,with a focal point of the laser beam positioned at a depth correspondingto a wafer to be produced firstly, from the upper surface of thehexagonal single crystal ingot which has been planarized, to form anexfoliation layer; a second production history forming step of applyinga laser beam of such a wavelength as to be transmitted through thehexagonal single crystal ingot to the hexagonal single crystal ingot,with a focal point of the laser beam positioned in an inside of a regionnot to be formed with devices of the wafer to be produced firstly, fromthe upper surface of the hexagonal single crystal ingot which has beenplanarized, to form a production history; and a wafer exfoliation stepof exfoliating the wafer to be produced firstly from the hexagonalsingle crystal ingot, with the exfoliation layer as a starting point ofexfoliation, to produce a wafer. The planarization step, the firstproduction history forming step, the exfoliation layer forming step, andthe wafer exfoliation step are repeated.

Preferably, the production histories formed in the first productionhistory forming step and the second production history forming stepinclude any one of a lot number of the hexagonal single crystal ingot,an order of the wafer produced, a production date of the wafer, aproduction plant of the wafer, and a machine model that has contributedto the production of the wafer.

Preferably, the hexagonal single crystal ingot is a hexagonal singlecrystal SiC ingot having a first surface, a second surface opposite tothe first surface, a c-axis extending from the first surface to thesecond surface, and a c-plane orthogonal to the c-axis, with the c-axisbeing inclined relative to a perpendicular to the first surface, andwith an off angle being formed by the c-plane and the first surface, andin the exfoliation layer forming step, a pulsed laser beam of such awavelength as to be transmitted through the hexagonal single crystal SiCingot is applied to the hexagonal single crystal SiC ingot, with a focalpoint of the pulsed laser beam positioned at a depth corresponding to athickness of a wafer to be produced from the first surface, and with thehexagonal single crystal SiC ingot and the focal point being relativelymoved in a first direction orthogonal to a second direction in which theoff angle is formed, to cause SiC to be separated into Si and C, tocause the pulsed laser beam applied next to be absorbed in previouslyformed C, and to cause SiC to be separated into Si and C in a chainreaction manner, thereby forming a rectilinear modified layer andforming a crack extending from the modified layer along the c-plane, andthe hexagonal single crystal SiC ingot and the focal point arerelatively moved in the direction in which the off angle is formed, toperform indexing by a predetermined amount, thereby forming theexfoliation layer.

In accordance with another aspect of the present invention, there isprovided a wafer producing apparatus including: a holding unit adaptedto hold a hexagonal single crystal ingot; a planarizing unit adapted togrind an upper surface of the hexagonal single crystal ingot held by theholding unit to planarize the upper surface; an exfoliation layerforming unit adapted to apply a laser beam of such a wavelength as to betransmitted through the hexagonal single crystal ingot to the hexagonalsingle crystal ingot held by the holding unit, with a focal point of thelaser beam positioned at a depth corresponding to a thickness of a waferto the produced from an upper surface of the hexagonal single crystalingot, to form an exfoliation layer; a production history forming unitadapted to apply a laser beam of such a wavelength as to be transmittedthrough the hexagonal single crystal ingot to the hexagonal singlecrystal ingot, with a focal point of the laser beam positioned in aninside of a region not to be formed with devices of a wafer to beproduced, to form a production history; a wafer exfoliating unit adaptedto hold the upper surface of the hexagonal single crystal ingot andexfoliate the wafer from the exfoliation layer; and a waferaccommodating unit adapted to accommodate the exfoliated wafer.

According to the wafer producing method of the present invention, thehistory of the wafer exfoliated from the hexagonal single crystal ingotis formed in the inside of the wafer, and it is possible, even in theprocess of device formation, to confirm the history of the wafer.Therefore, in the case where a defect is generated in a device, it ispossible to trace back the history of the wafer, and to investigate thecause of the defect in the device, leading to prevention of recurrenceof the defect. Further, even after the wafer is exfoliated from thehexagonal single crystal ingot, the hexagonal single crystal ingot canbe specified by the production history formed in the first productionhistory forming step.

According to the wafer producing apparatus of the present invention, thehistory of the wafer exfoliated from the hexagonal single crystal ingotis formed in the inside of the wafer, and, therefore, it is possible,even in the process of device formation, to confirm the history of thewafer. In the case where a defect is generated in a device, it ispossible to trace back the history of the wafer, and to investigate thecause of the defect in the device, leading to prevention of recurrenceof the defect. In addition, since the wafer producing method asabove-mentioned can be carried out, it is possible, even after the waferis exfoliated from the hexagonal single crystal ingot, to specify thehexagonal single crystal ingot by the production history formed in thefirst production history forming step.

The above and other objects, features and advantages of the presentinvention and the manner of realizing them will become more apparent,and the invention itself will best be understood from a study of thefollowing description and appended claims with reference to the attacheddrawings showing a preferred embodiment of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a wafer producing apparatus according toan embodiment of the present invention;

FIG. 2 is a major part perspective view of the wafer producing apparatusdepicted in FIG. 1;

FIG. 3 is a major part enlarged perspective view of a planarizing unitdepicted in FIG. 2;

FIG. 4 is a schematic view depicting a state in which cleaning water isjetted from a first cleaning section of a cleaning unit and drying airis jetted from a second cleaning section;

FIG. 5 is a perspective view of a laser applying unit depicted in FIG.1;

FIG. 6 is a perspective view of the laser applying unit in a state inwhich a frame body is omitted from the laser applying unit depicted inFIG. 5;

FIG. 7 is a block diagram of the laser applying unit depicted in FIG. 5;

FIG. 8 is a perspective view of a wafer exfoliating unit depicted inFIG. 1;

FIG. 9 is a sectional view of the wafer exfoliating unit depicted inFIG. 1;

FIG. 10 is a perspective view of an ingot carrying unit depicted in FIG.1;

FIG. 11A is a front view of a hexagonal single crystal SiC ingot;

FIG. 11B is a plan view of the hexagonal single crystal SiC ingot;

FIG. 12A is a perspective view of the hexagonal single crystal SiC ingotand a substrate;

FIG. 12B is a perspective view depicting a state in which the substrateis mounted to the hexagonal single crystal SiC ingot;

FIG. 13 is a perspective view depicting a state in which a holding stepis carried out;

FIG. 14 is a plan view depicting a state in which a first ingot ispositioned at a planarization position and a second ingot is positionedat a standby position;

FIG. 15 is a plan view depicting a state in which a turntable is rotatedby 90 degrees from the state depicted in FIG. 14 and a third ingot ispositioned at the standby position;

FIG. 16A is a perspective view depicting a state in which a firstproduction history forming step is carried out;

FIG. 16B is a front view depicting a state in which the first productionhistory forming step is carried out;

FIG. 17A is a perspective view depicting a state in which an exfoliationlayer forming step is carried out;

FIG. 17B is a front view depicting a state in which the exfoliationlayer forming step is carried out;

FIG. 18A is a plan view of a hexagonal single crystal SiC ingot formedwith an exfoliation layer;

FIG. 18B is a sectional view taken along line B-B of FIG. 18A;

FIG. 19A is a perspective view depicting a state in which a secondproduction history forming step is carried out;

FIG. 19B is a front view depicting a state in which the secondproduction history forming step is carried out;

FIG. 20 is a plan view depicting a state in which the turntable isrotated by 90 degrees from the state depicted in FIG. 15 and a fourthingot is positioned at the standby position;

FIG. 21A is a perspective view depicting a state in which a liquid tankis positioned on the upper side of a chuck table;

FIG. 21B is a perspective view depicting a state in which a lowersurface of the liquid tank makes contact with an upper surface of thechuck table;

FIG. 22 is a perspective view depicting a state in which a wafer isexfoliated from an ingot by the wafer exfoliating unit;

FIG. 23 is a plan view depicting a state in which the turntable isrotated by 90 degrees from the state depicted in FIG. 20;

FIG. 24 is a plan view depicting a state in which the turntable isrotated by 90 degrees from the state depicted in FIG. 23; and

FIG. 25 is a plan view depicting a state in which the turntable isrotated by 90 degrees from the state depicted in FIG. 24.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

An embodiment of a wafer producing method and a wafer producingapparatus according to the present invention will be described below,referring to the drawings. First, the wafer producing apparatusaccording to the present invention will be described. A wafer producingapparatus 2 illustrated in FIG. 1 includes: a holding unit 4 adapted tohold a hexagonal single crystal ingot (hereinafter referred to simply asingot); a planarizing unit 6 adapted to grind an upper surface of theingot held by the holding unit 4 to planarize the upper surface; anexfoliation layer forming unit adapted to apply a laser beam of such awavelength as to be transmitted through the ingot to the ingot, with afocal point of the laser beam positioned at a depth corresponding to athickness of a wafer to be produced from the upper surface of the ingotheld by the holding unit 4, to form an exfoliation layer; a productionhistory forming unit adapted to apply a laser beam of such a wavelengthas to be transmitted through the ingot to the ingot, with a focal pointof the laser beam positioned in an inside of a region not to be formedwith devices of the wafer to be produced, to form a production history;a wafer exfoliating unit 10 adapted to hold the upper surface of theingot and exfoliate the wafer from the exfoliation layer; and a waferaccommodating unit 12 adapted to accommodate the exfoliated wafer. Whilean example wherein the exfoliation layer forming unit and the productionhistory forming unit are configured by use of the same laser applyingunit 8 is described in the present embodiment, the exfoliation layerforming unit and the production history forming unit may be configuredby use of different laser applying units.

The holding unit 4 will be described referring to FIG. 2. A base 14 ofthe wafer producing apparatus 2 is formed with a turntable accommodatingsection 16 recessed downward from an upper surface of the base 14, and acircular turntable 18 is rotatably accommodated in the turntableaccommodating section 16. The turntable 18 is rotated around arotational center constituted of an axis extending in a Z-axis directionand passing through a radial center of the turntable 18 by a turntablemotor (not depicted) incorporated in the base 14. Besides, the holdingunit 4 in the present embodiment includes four circular chuck tables 20rotatably disposed on the upper surface of the turntable 18. With theturntable 18 rotated, each of the chuck tables 20 is positioned at astandby position P1, a planarization position P2 under the planarizingunit 6, a laser applying position P3 under the laser applying unit 8,and a wafer exfoliation position P4 under the wafer exfoliating unit 10.Each chuck table 20 is rotated around a rotational center constituted ofan axis extending in the Z-axis direction and passing through a radialcenter of the chuck table 20 by each of four chuck table motors (notdepicted) incorporated in the base 14. The four chuck tables 20 arrangedat regular intervals (intervals of 90 degrees) along the circumferentialdirection of the turntable 18 are partitioned by a cross-shapedpartition wall 18 a disposed on the upper surface of the turntable 18.In addition, at the upper surface of each chuck table 20 is disposed aporous suction chuck 22 connected to suction means (not depicted). Eachchuck table 20 constituting the holding unit 4 can suction hold an ingotplaced on the upper surface of the suction chuck 22, by generating asuction force at the upper surface of the suction chuck 22 by thesuction means. Note that the Z-axis direction is the vertical directionindicated by arrow Z in FIG. 2. Besides, an X-axis direction indicatedby arrow X in FIG. 2 is a direction orthogonal to the Z-axis direction,and a Y-axis direction indicated by arrow Y in FIG. 2 is a directionorthogonal to the X-axis direction and the Z-axis direction. A planedefined by the X-axis direction and the Y-axis direction issubstantially horizontal.

As illustrated in FIG. 2, the planarizing unit 6 includes a mountingwall 24 extending in the Z-axis direction from an upper surface of oneend portion in the Y-axis direction of the base 14, a Z-axis directionmovable plate 26 mounted to the mounting wall 24 such as to be movablein the Z-axis direction, and a Z-axis direction moving mechanism 28adapted to move the Z-axis direction movable plate 26 in the Z-axisdirection. On one side surface (a surface on the viewer's side in FIG.2) of the mounting wall 24, a pair of guide rails 24 a extending in theZ-axis direction are provided, with a spacing therebetween in the X-axisdirection. The Z-axis movable plate 26 is formed with a pair of guidedgrooves 26 a extending in the Z-axis direction, correspondingly to eachof the guide rails 24 a on the mounting wall 24. The guided rails 26 aare engaged with the guide rails 24 a, whereby the Z-axis directionmovable plate 26 is mounted to the mounting wall 24 such as to bemovable in the Z-axis direction. The Z-axis direction moving mechanism28 includes a ball screw 30 extending in the Z-axis direction along oneside surface of the mounting wall 24, and a motor 32 connected to oneend portion of the ball screw 30. A nut section (not depicted) of theball screw 30 is fixed to the Z-axis direction movable plate 26.Besides, the Z-axis direction moving mechanism 28 converts a rotationalmotion of the motor 32 into a rectilinear motion, and transmits therectilinear motion to the Z-axis direction movable plate 26, by the ballscrew 30, thereby moving the Z-axis direction movable plate 26 in theZ-axis direction along the guide rails 24 a.

Referring to FIG. 3 together with FIG. 2, the description of theplanarizing unit 6 will be continued. A support block 34 projecting inthe Y-axis direction is fixed to an outer surface of the Z-axisdirection movable plate 26. A motor 36 is supported on an upper surfaceof the support block 34, and a spindle housing 38 extending downward issupported on a lower surface of the support block 34. A cylindricalspindle 40 is supported on the spindle housing 38 in such a manner as tobe rotatable around an axis extending in the Z-axis direction. An upperend of the spindle 40 is connected to the motor 36, and the spindle 40is rotated around the axis extending in the Z-axis direction by themotor 36. As depicted in FIG. 3, a circular disk-shaped wheel mount 42is fixed to a lower end of the spindle 40, and an annular grinding wheel46 is fixed to a lower surface of the wheel mount 42 by bolts 44. At anouter peripheral edge portion of a lower surface of the grinding wheel46, there are fixed a plurality of grindstones 48 arranged in an annularpattern at intervals in the circumferential direction. As illustrated inFIG. 3, a rotational center of the grinding wheel 46 is deviated from arotational center of the chuck table 20, such that the grindstones 48pass through the rotational center of the chuck table 20 positioned atthe planarization position P2. Therefore, in the planarizing unit 6,when the upper surface of the ingot held by the chuck table 20 and thegrindstones 48 make contact with each other while the chuck table 20 andthe grinding wheel 46 are mutually rotated, the upper surface of theingot can be as a whole ground by the grindstones 48, and, accordingly,the upper surface of the ingot held by the chuck table 20 can be groundand planarized.

The wafer producing apparatus 2 further includes a cleaning unit 50adapted to clean the ingot planarized by the planarizing unit 6. Asdepicted in FIG. 2, the cleaning unit 50 includes: a support body 52mounted on the upper surface of the base 14 along a side surface of themounting wall 24 of the planarizing unit 6; a first cleaning section 54extending in the Y-axis direction from an upper portion of the supportbody 52; and a second cleaning section 56 extending in the Y-axisdirection from an upper portion of the support body 52 in the state ofbeing aligned with the first cleaning section 54. A lower surface of thefirst cleaning section 54 which can be formed from a hollow member isformed with a plurality of jet holes (not depicted) at intervals in theY-axis direction, and the first cleaning section 54 is connected tocleaning water supplying means (not depicted). In addition, a lowersurface of the second cleaning section 56 which can be formed from ahollow member is also formed with a plurality of jet holes (notdepicted) at intervals in the Y-axis direction, and the second cleaningsection 56 is connected to a compressed air source (not depicted). Asillustrated in FIG. 4, the cleaning unit 50 has a configuration whereincleaning water 55 is obliquely jetted downward from each of the jetholes of the first cleaning section 54 to the planarizing unit 6 side,whereby grinding swarf can be removed from the ingot, and the ingotplanarized by the planarizing unit 6 can be cleaned. In addition, thecleaning unit 50 has a configuration wherein drying air 57 is jetteddownward from each of jet holes of the second cleaning section 56,whereby the cleaning water 55 can be removed from the ingot, and theingot can be dried.

Referring to FIGS. 1, 5 and 6, the laser applying unit 8 constitutingthe exfoliation layer forming unit and the production history formingunit will be described. The laser applying unit 8 includes: a frame body58 extending upward from the upper surface of the base 14 in the stateof being aligned with the mounting wall 24 of the planarizing unit 6; aguide plate 60 extending in the Y-axis direction from an upper portionof the frame body 58; a Y-axis direction movable member 62 supported bythe guide plate 60 such as to be movable in the Y-axis direction; and aY-axis direction moving mechanism 64 adapted to move the Y-axisdirection movable member 62 in the Y-axis direction. At lower portionsof both ends in regard of the X-axis direction of the guide plate 60, apair of guide rails 60 a extending in the Y-axis direction are formed.As depicted in FIG. 6, the Y-axis direction movable member 62 includes apair of guided sections 66 disposed with a spacing therebetween in theX-axis direction, and a mounting section 68 bridgingly arranged betweenlower ends of the guided sections 66 and extending in the X-axisdirection. A guided rail 66 a extending in the Y-axis direction isformed at an upper portion of each guided section 66. The guided rails66 a are engaged with guide rails 60 a, whereby the Y-axis directionmoving member 62 is supported on the guide plate 60 such as to bemovable in the Y-axis direction. In addition, at lower portions of bothends in regard of the Y-axis direction of the mounting section 68, apair of guide rails 68 a extending in the X-axis direction are formed.As illustrated in FIG. 6, the Y-axis direction moving mechanism 64includes a ball screw 70 extending in the Y-axis direction under theguide plate 60, and a motor 72 connected to one end portion of the ballscrew 70. A gate-formed nut section 70 a of the ball screw 70 is fixedto an upper surface of the mounting section 68. The Y-axis directionmoving mechanism 64 convers a rotational motion of the motor 72 into arectilinear motion, and transmits the rectilinear motion to the Y-axisdirection movable member 62, by the ball screw 70, thereby moving theY-axis direction movable member 62 in the Y-axis direction along theguide rails 60 a.

The description of the laser applying unit 8 will be continued referringto FIG. 6. The laser applying unit 8 further includes an X-axisdirection movable plate 74 mounted to the mounting section 68 such as tobe movable in the X-axis direction, and an X-axis direction movingmechanism 76 adapted to move the X-axis direction movable plate 74 inthe X-axis direction. Both end portions in regard of the Y-axisdirection of the X-axis direction movable plate 74 are engaged with theguide rails 68 a of the mounting section 68, whereby the X-axisdirection movable plate 74 is mounted to the mounting section 68 such asto be movable in the X-axis direction. The X-axis direction movingmechanism 76 includes a ball screw 78 extending in the X-axis directionon the upper side of the mounting section 68, and a motor 80 connectedto one end portion of the ball screw 78. A nut section 78 a of the ballscrew 78 is passed through an opening 68 b of the mounting section 68and fixed to an upper surface of the X-axis direction movable plate 74.The X-axis direction moving mechanism 76 converts a rotational motion ofthe motor 80 into a rectilinear motion, and transmits the rectilinearmotion to the X-axis direction movable plate 74, by the ball screw 78,thereby moving the X-axis direction movable plate 74 in the X-axisdirection along the guide rails 68 a.

The description of the laser applying unit 8 will be continued referringto FIGS. 6 and 7. The laser applying unit 8 further includes: a laseroscillator 82 incorporated in the frame body 58; an attenuator (notdepicted) adapted to control the output of a pulsed laser beam LBemitted from the laser oscillator 82; a first mirror 84 mounted to alower surface of the mounting section 68 in the state of being spacedfrom the laser oscillator 82 in the Y-axis direction; a focusing device86 mounted to a lower surface of the X-axis direction movable plate 74such as to be movable in the Z-axis direction; a second mirror (notdepicted) mounted on the lower surface of the X-axis direction movableplate 74 directly above the focusing device 86 in the state of beingspaced from the first mirror 84 in the X-axis direction; an alignmentunit 88 mounted to the lower surface of the X-axis direction movableplate 74 in the state of being spaced from the focusing device 86 in theX-axis direction; and focal point position control means (not depicted)moving the focusing device 86 in the Z-axis direction to control theZ-axis directional position of the focal point of the focusing device86. The laser oscillator 82 is adapted to oscillate the pulsed laserbeam LB of such a wavelength as to be transmitted through the ingot. Thefocusing device 86 has a focusing lens (not depicted) adapted to focusthe pulsed laser beam LB emitted from the laser oscillator 82, and thefocusing lens is located under the second mirror.

The alignment unit 88 images the ingot held by the chuck table 20, todetect a region to be laser processed. The focal point position controlmeans may be configured, for example, to include a ball screw (notdepicted) of which a nut section is fixed to the focusing device 86 andwhich extends in the Z-axis direction, and a motor (not depicted)connected to one end portion of the ball screw. The focal point positioncontrol means having such a configuration convers a rotational motion ofthe motor into a rectilinear motion, and transmits the rectilinearmotion to the focusing device 86, by the ball screw, thereby controllingthe Z-axis directional position of the focal point of the pulsed laserbeam LB focused by the focusing lens. The pulsed laser beam LB emittedfrom the laser oscillator 82 with an optical path set in the Y-axisdirection, is controlled to an appropriate output by the attenuator, isthen changed in the optical path from the Y-axis direction into theX-axis direction by the first mirror 84, to be led to the second mirror,is subsequently changed in the optical path from the X-axis directioninto the Z-axis direction by the second mirror, to be led to thefocusing lens of the focusing device 86, and is thereafter focused bythe focusing lens, to be applied to the ingot held by the chuck table20.

In addition, both in the case where the focusing device 86 is moved inthe Y-axis direction by moving the Y-axis direction movable member 62 bythe Y-axis direction moving mechanism 64 and in the case where thefocusing device 86 is moved in the X-axis direction by moving the X-axisdirection movable plate 74 by the X-axis direction moving mechanism 76,the pulsed laser beam LB emitted from the laser oscillator 82 inparallel to the Y-axis direction is changed in optical path from theY-axis direction into the X-axis direction by the first mirror 84, to beled to the second mirror, and the pulsed laser beam LB led to the secondmirror is changed in optical path from the X-axis direction into theZ-axis direction by the second mirror, to be led to the focusing device86. In the laser applying unit 8 configured as above, the ingot held bythe chuck table 20 is imaged by the alignment unit 88 to detect a regionto be laser processed, and then the pulsed laser beam LB of such awavelength as to be transmitted through the ingot is applied to theingot held by the chuck table 20, with a focal point of the pulsed laserbeam LB positioned at a depth corresponding to the thickness of thewafer to be produced from an upper surface of the ingot held by thechuck table 20 by moving the focusing device 86 in the Z-axis directionby the focal point position control means, and while appropriatelymoving the X-axis direction movable plate 74 by the X-axis directionmoving mechanism 76 and appropriately moving the Y-axis directionmovable member 62 in the Y-axis direction by the Y-axis direction movingmechanism 64, whereby an exfoliation layer can be formed in the insideof the ingot and a production history can be formed in the inside of theingot.

Referring to FIGS. 1 and 8, the wafer exfoliating unit 10 will bedescribed. The wafer exfoliating unit 10 includes a support body 90fixed to the upper surface of the base 14, an arm 92 extending in theX-axis direction from its base end portion supported on the support body90 such as to be movable in the Z-axis direction, and an arm movingmechanism 94 adapted to move the arm 92 in the Z-axis direction. The armmoving mechanism 94 includes a ball screw (not depicted) extending inthe Z-axis direction in the inside of the support body 90, and a motor96 connected to one end portion of the ball screw. A nut section (notdepicted) of the ball screw of the arm moving mechanism 94 is fixed tothe base end portion of the arm 92. The arm moving mechanism 94 convertsa rotational motion of the motor 96 into a rectilinear motion, andtransmits the rectilinear motion to the arm 92, by the ball screw,thereby moving the arm 92 in the Z-axis direction along guide rails (notdepicted) incorporated in the support body 90 and extending in theZ-axis direction.

The description of the wafer exfoliating unit 10 will be continuedreferring to FIGS. 8 and 9. To a tip portion of the arm 92 is fixed aliquid tank 98 that accommodates a liquid in cooperation with the chucktable 20 when exfoliating the wafer from the ingot. The liquid tank 98includes a circular top wall 100, and a cylindrical side wall 102drooping from a peripheral edge of the top wall 100, and is opened on alower end side. The outside diameter of the side wall 102 is not morethan the diameter of the chuck table 20, such that, when the arm 92 islowered, a lower end of the side wall 102 comes into contact with anupper surface of the chuck table 20. The top wall 100 is additionallyprovided with a cylindrical liquid supply section 104 providingcommunication between the outside and the inside of the liquid tank 98.The liquid supply section 104 is connected to liquid supply means (notdepicted). As depicted in FIG. 9, an annular packing 106 is additionallyprovided at a lower end of the side wall 102. When the arm 92 is loweredby the arm moving mechanism 94 to cause the lower end of the side wall102 to make contact with the upper surface of the chuck table 20, aliquid accommodating space 108 is defined by the upper surface of thechuck table 20 and an inner surface of the liquid tank 98. A liquid 110supplied from the liquid supply means into the liquid accommodatingspace 108 through the liquid supply section 104 is prevented by thepacking 106 from leaking out of the liquid accommodating space 108.

The description of the wafer exfoliating unit 10 will be furthercontinued referring to FIGS. 8 and 9. An air cylinder 112 is mounted tothe top wall 100 of the liquid tank 98. A cylinder tube 112 a of the aircylinder 112 extends upward from an upper surface of the top wall 100.As illustrated in FIG. 9, a lower end portion of a piston rod 112 b ofthe air cylinder 112 projects to the lower side of the top wall 100 bypassing through a penetrating opening 100 a of the top wall 100. Acircular disk-shaped ultrasonic vibration generating member 114 whichcan be formed from a piezoelectric ceramic or the like is fixed to thelower end portion of the piston rod 112 b. A circular disk-shapedsuction piece 116 is fixed to a lower surface of the ultrasonicvibration generating member 114. The suction piece 116, formed with aplurality of suction holes (not depicted) in a lower surface thereof, isconnected to suction means (not depicted). With a suction forcegenerated at the lower surface of the suction piece 116 by the suctionmeans, the suction piece 116 can hold the ingot by suction. In the waferexfoliating unit 10, the arm 92 is lowered by the arm moving mechanism94, the lower end of the side wall 102 is put into close contact withthe upper surface of the chuck table 20 supporting the ingot formed withthe exfoliation layer by the laser applying unit 8, the piston rod 112 bof the air cylinder 112 is lowered, and the suction piece 116 is putinto contact with the upper surface of the ingot under suction; then, inthis state, the liquid 110 is accommodated in the liquid accommodatingspace 108, after which the ultrasonic vibration generating member 114 isoperated to apply ultrasonic vibration to the ingot, whereby the wafercan be exfoliated from the ingot, with the exfoliation as a startingpoint of exfoliation.

The wafer accommodating unit 12 will be described referring to FIGS. 1and 2. The wafer accommodating unit 12 includes at least one cassette inwhich a plurality of wafers exfoliated from the ingot by the waferexfoliating unit 10 can be accommodated at intervals in the verticaldirection. In the case where a plurality of cassettes are used, the samecassette can be used. In the present embodiment, the wafer accommodatingunit 12 includes four cassettes, namely, a first cassette 131 a, asecond cassette 131 b, a third cassette 131 c, and a fourth cassette 131d. In addition, a wafer carrying unit 118 by which the wafer exfoliatedfrom the ingot is carried from the wafer exfoliating unit 10 to thewafer accommodating unit 12 is disposed between the wafer exfoliatingunit 10 and the wafer accommodating unit 12. As illustrated in FIGS. 1and 2, the wafer carrying unit 118 includes: lift means 120 extendingupward from the upper surface of the base 14; a first motor 122 fixed toa tip of the lift means 120; a first arm 124 having a base end portionrotatably connected to the first motor 122; a second motor 126 fixed toa tip portion of the first arm 124; a second arm 128 having a base endportion rotatably connected to the second motor 126; and a suction piece130 fixed to a tip portion of the second arm 128. The first motor 122,which is lifted up and down in the Z-axis direction by the lift means120, rotates the first arm 124 around a rotational center constituted ofan axis extending in the Z-axis direction by passing through the baseend portion of the first arm 124, relative to the lift means 120. Thesecond motor 126 rotates the second arm 128 around an axis extending inthe Z-axis direction by passing through the base end portion of thesecond arm 128, relative to the first arm 124. The suction piece 130,formed with a plurality of suction holes 130 a in an upper surfacethereof, is connected to suction means (not depicted). With a suctionforce generated at the upper surface of the suction piece 130 by thesuction means, the wafer carrying unit 118 can suction hold the wafer,exfoliated from the ingot by the wafer exfoliating unit 10, by thesuction piece 130, and can carry the wafer suction held by the suctionpiece 130 from the wafer exfoliating unit 10 to the wafer accommodatingunit 12 by operating the first arm 124 and the second arm 128 by thelift means 120, the first motor 122 and the second motor 126.

As depicted in FIG. 1, the wafer producing apparatus 2 further includesan ingot accommodating unit 132 in which to accommodate the ingot, andan ingot carrying unit 134 adapted to carry the ingot from the ingotaccommodating unit 132 to the holding unit 4. The ingot accommodatingunit 132 in the present embodiment includes four circular accommodatingrecesses 132 a formed in the upper surface of the base 14 at intervalsin the Y-axis direction. The ingots are accommodated respectively in thefour accommodating recesses 132 a of which the diameter is slightlylarger than the diameter of the ingots.

Referring to FIGS. 1 and 10, the ingot carrying unit 134 will bedescribed. The ingot carrying unit 134 includes: a frame body 136extending in the Y-axis direction along the ingot accommodating unit 132on the upper surface of the base 14; an arm 138 extending in the X-axisdirection from its base end portion rotatably supported by the framebody 136 such as to be movable in the Y-axis direction; and an armmoving mechanism 140 adapted to move the arm 138 in the Y-axisdirection. The frame body 136 is formed with a guide opening 136 aextending in the Y-axis direction. The arm moving mechanism 140 includesa ball screw (not depicted) extending in the Y-axis direction in theinside of the frame body 136, and a motor 142 connected to one endportion of the ball screw. A nut section (not depicted) of the ballscrew of the arm moving mechanism 140 is fixed to a base end portion ofthe arm 138. The arm moving mechanism 140 converts a rotational motionof the motor 142 into a rectilinear motion, and transmits therectilinear motion to the arm 138, thereby moving the arm 138 in theY-axis direction along the guide opening 136 a. As depicted in FIG. 10,an air cylinder 144 extending in the Z-axis direction is mounted to atip portion of the arm 138, and a suction piece 146 is fixed to a lowerend portion of a piston rod 144 a of the air cylinder 144. The suctionpiece 146, formed with a plurality of suction holes (not depicted) in alower surface thereof, is connected to suction means (not depicted).With a suction force generated at the lower surface of the suction piece146 by the suction means, the ingot carrying unit 134 can suction holdan upper surface of the ingot accommodated in the ingot accommodatingunit 132 by the suction piece 146, and, by moving the arm 138 by the armmoving mechanism 140 and moving the suction piece 146 by the aircylinder 144, the ingot carrying unit 134 can carry the ingot held bythe suction piece 146 from the ingot accommodating unit 132 to theholding unit 4.

FIGS. 11A and 11B depict an ingot 150 which can be processed by thewafer producing apparatus 2 as aforementioned. The ingot 150 in thepresent embodiment is formed in a cylindrical shape as a whole fromhexagonal single crystal SiC, and has a circular first surface 152, acircular second surface 154 opposite to the first surface 152, aperipheral surface 156 located between the first surface 152 and thesecond surface 154, a c-axis (<0001> direction) extending from the firstsurface 152 to the second surface 154, and a c-plane ({0001} plane)orthogonal to the c-axis. In the ingot 150, the c-axis is inclinedrelative to a perpendicular 158 to the first surface 152, and an offangle α (for example, α=1, 3, or 6 degrees) is formed by the c-plane andthe first surface 152. The direction in which the off angle α is formedis indicated by arrow A in FIGS. 11A and 11B. In addition, theperipheral surface 156 of the ingot 150 is formed with a rectangularfirst orientation flat 160 and a rectangular second orientation flat 162for indicating a crystal orientation. The first orientation flat 160 isparallel to the direction A in which the off angle α is formed, whilethe second orientation flat 162 is orthogonal to the direction A inwhich the off angle α is formed. As depicted in FIG. 11B, as viewed fromabove, a length L2 of the second orientation flat 162 is shorter than alength L1 of the first orientation flat 160 (L2<L1). Note that the ingotto be processed by the wafer producing apparatus 2 is not limited to theabove-mentioned ingot 150; for example, the ingot may be a hexagonalsingle crystal SiC ingot wherein the c-axis is not inclined relative tothe perpendicular to the first surface, and the off angle between thec-plane and the first surface is zero degrees (or the perpendicular tothe first surface and the c-axis are coincident), or may be a hexagonalsingle crystal ingot formed from a material other than hexagonal singlecrystal SiC, such as GaN (gallium nitride).

The wafer producing method according to the present invention will nowbe described below. In the present embodiment, the wafer producingmethod using the wafer producing apparatus 2 as aforementioned will bedescribed. In the present embodiment, first, four ingots 150 areprepared, and a substrate mounting step is carried out wherein circularsubstrates 164 are mounted to lower surfaces (in the present embodiment,the second surfaces 154) of the prepared ingots 150 through anappropriate adhesive, as depicted in FIGS. 12A and 12B. The substratemounting step is performed for holding the ingot 150 formed with thefirst orientation flat 160 and the second orientation flat 162 with apredetermined suction force by the circular suction chuck 22 of thechuck table 20. The diameter of the substrate 164 is slightly largerthan the diameter of the ingot 150, and is slightly larger than thediameter of the suction chuck 22 of the chuck table 20. When the ingot150 is placed on the chuck table 20, with the substrate 164 directeddownward, the suction chuck 22 is covered by the substrate 164;therefore, when the suction means connected to the suction chuck 22 isoperated, the substrate 164 is sucked with a predetermined suction forceby the suction chuck 22, whereby the ingot 150 formed with the firstorientation flat 160 and the second orientation flat 162 can be held bythe chuck table 20. Note that in the case where the diameter of theingot is larger than that of the suction chuck 22 so that the uppersurface of the suction chuck 22 is wholly covered with the ingot whenthe ingot is placed on the chuck table 20, sucking-in of air through anexposed part of the suction chuck 22 does not occur at the time ofsuction by the chuck table 22, and the ingot can be sucked with apredetermined suction force by the suction chuck 22, and, therefore, thesubstrate mounting step may not necessarily be carried out.

After the substrate mounting step is conducted, an ingot accommodatingstep is carried out in which the ingots 150 are accommodated in theingot accommodating unit 132. In the present embodiment, as depicted inFIG. 1, in the ingot accommodating step, the four ingots 150 areaccommodated in the four accommodating recesses 132 a of the ingotaccommodating unit 132, with the substrates 164 directed downward. Notethat in the following description, the four ingots 150 will be referredto as a first ingot 150 a, a second ingot 150 b, a third ingot 150 c anda fourth ingot 150 d, in this order from the ingot 150 accommodated inthe accommodating recess 132 a nearer to the turntable 18, forconvenience. It is to be noted, however, where it is unnecessary todiscriminate the ingots 150 a to 150 d from one another, they may bereferred to simply as “the ingots 150”.

After the ingot accommodating step is conducted, an ingot carrying stepis carried out wherein the ingot 150 is carried from the ingotaccommodating unit 132 to the holding unit 4 by the ingot carrying unit134. In the ingot carrying step, first, the arm 138 is moved by the armmoving mechanism 140 of the ingot carrying unit 134, and the suctionpiece 146 is positioned at a position on the upper side of the firstingot 150 a accommodated in the ingot accommodating unit 132. Next, thesuction piece 146 is lowered by the air cylinder 144 of the ingotcarrying unit 134, and a lower surface of the suction piece 146 is putinto close contact with an upper surface (in the present embodiment, thefirst surface 152) of the first ingot 150 a. Subsequently, the suctionmeans connected to the suction piece 146 is operated to generate asuction force at the lower surface of the suction piece 146, whereby thelower surface of the suction piece 146 is caused to suck the uppersurface of the first ingot 150 a. Next, the suction piece 146 suckingthe first ingot 150 a is moved upward by the air cylinder 144.Subsequently, the arm 138 is moved by the arm moving mechanism 140, andthe suction piece 146 is positioned at a position on the upper side ofthe chuck table 20 positioned at the standby position P1. Subsequently,as depicted in FIG. 13, the suction piece 146 is lowered by the aircylinder 144, and the lower surface of the substrate 164 is put intocontact with the upper surface of the chuck table 20 positioned at thestandby position P1. Then, the operation of the suction means connectedto the suction piece 146 is stopped to release the suction force at thesuction piece 146, and the first ingot 150 a is placed on the uppersurface of the chuck table 20 positioned at the standby position P1. Asa result, the first ingot 150 a can be carried from the ingotaccommodating unit 132 to the chuck table 20 constituting the holdingunit 4 by the ingot carrying unit 134.

After the ingot carrying step is conducted, a holding step of holdingthe ingot 150 by the holding unit 4 is carried out. In the holding step,the suction means connected to the suction chuck 22 on which the firstingot 150 a is placed is operated to generate a suction force at theupper surface of the suction chuck 22, and the first ingot 150 a issuction held by the chuck table 20.

After the holding step is performed, the turntable 18 is rotated by 90degrees clockwise as viewed from above by a turntable motor, whereby thefirst ingot 150 a is moved to the planarization position P2, as depictedin FIG. 14. For the first ingot 150 a positioned at the planarizationposition P2, the planarization step of grinding the upper surface of theingot 150 to planarize the upper surface may not necessary be performedat this stage. The ingot 150 normally has the first surface 152 and thesecond surface 154 planarized to such an extent as not to hamper theincidence of a laser beam in an exfoliation layer forming step to bedescribed later, and, therefore, for the ingot 150 carried from theingot accommodating unit 132 and first positioned at the planarizationposition P2, the planarization step may not necessarily be carried out.Then, for the second ingot 150 b accommodated in the ingot accommodatingunit 132, the ingot carrying step is performed, and the holding step ofholding it by the chuck table 20 positioned at the standby position P1is carried out. Note that while the first ingot 150 a positioned at theplanarization step P2 and the second ingot 150 b positioned at thestandby position P1 are described in the same direction in FIG. 14 forconvenience, the ingot 150 sucked by the chuck table 20 is set in anarbitrary direction by rotation of the turntable 18 and rotation of eachchuck table 20, and this applies also to FIG. 15 and the like.

After the ingot carrying step and the holding step are performed for thesecond ingot 150 b, the turntable 18 is rotated by 90 degrees clockwiseas viewed from above. By this, as depicted in FIG. 15, the first ingot150 a is moved to the laser applying position P3, and the second ingot150 b is moved to the planarization position P2. Then, for the firstingot 150 a, a first production history forming step wherein a laserbeam of such a wavelength as to be transmitted through the ingot 150 isapplied to the ingot 150, with a focal point of the laser beampositioned in the inside of a region not to be formed with devices of awafer to be produced secondly from the upper surface of the ingot 150which has been planarized, to form a production history, is performed bythe laser applying unit 8; next, an exfoliation layer forming stepwherein a laser beam of such a wavelength as to be transmitted throughthe ingot 150 is applied to the ingot 150, with a focal point of thelaser beam positioned at a depth corresponding to the thickness of awafer to be produced firstly from the upper surface of the ingot 150which has been planarized, to form an exfoliation layer, is conducted bythe laser applying unit 8; and subsequently, a second production historyforming step wherein a laser beam of such a wavelength as to betransmitted through the ingot 150 is applied to the ingot 150, with afocal point of the laser beam positioned in the inside of a region notto be formed with devices of the wafer to be produced firstly from theupper surface of the ingot 150 which has been planarized, to form aproduction history, is performed by the laser applying unit 8. On theother hand, as for the second ingot 150 b, since the second ingot 150 bis carried from the ingot accommodating unit 132 and firstly positionedat the planarization position P2 as aforementioned, the planarizationstep may not necessarily be carried out. In addition, for the thirdingot 150 c accommodated in the ingot accommodating unit 132, the ingotcarrying step is performed, and the holding step of holding it by thechuck table 20 positioned at the standby position P1 is conducted.

The first production history forming step will be described referring toFIGS. 16A and 16B. In the first production history forming step, first,the X-axis direction movable plate 74 is moved by the X-axis directionmoving mechanism 76 (see FIGS. 5 and 6) of the laser applying unit 8 andthe Y-axis direction movable member 62 is moved by the Y-axis directionmoving mechanism 64, to position the alignment unit 88 at a position onthe upper side of the ingot 150, and the ingot 150 is imaged by thealignment unit 88 from above the ingot 150. Next, based on an image ofthe ingot 150 picked up by the alignment unit 88, the chuck table 20 isrotated by the chuck table motor, and the X-axis direction movable plate74 is moved by the X-axis direction moving mechanism 76 and the Y-axisdirection movable member 62 is moved by the Y-axis direction movingmechanism 64, to control the position of the focusing device 86.Subsequently, the focusing device 86 is moved in the Z-axis direction bythe focal point position control means, whereby a focal point FP ispositioned at a position which is on the first orientation flat 160 sideand is in the inside of a peripheral surplus region not to be formedwith devices of a wafer to be produced secondly from the upper surfaceof the ingot 150, as illustrated in FIGS. 16A and 16B. Next, whilerelatively moving the ingot 150 and the focal point FP appropriately, apulsed laser beam LB of such a wavelength as to be transmitted throughthe ingot 150 is applied through the focusing device 86 to the ingot150. By this, a production history 165 which can be configured in theform of a bar code can be formed in the inside of the peripheral surplusregion not to be formed with devices of the wafer to be producedsecondly from the upper surface of the ingot 150.

The production history 165 formed in the first production historyforming step includes any one of the lot number of the ingot 150, theorder of the wafer produced from the ingot 150, the production date ofthe wafer, the production plant of the wafer, and the wafer producingapparatus which has contributed to the production of the wafer. Whilethe production history 165 is formed along the first orientation flat160 in the present embodiment, the production history 165 may be formedin any region where devices are not formed of the wafer to be produced;for example, the production history 165 may be formed along the secondorientation flat 162, or the production history 165 may be formed alongan arcuate peripheral edge. At the time of relatively moving the ingot150 and the focal point FP in the first production history forming step,the ingot 150 and the focal point FP can be relatively moved in theX-axis direction, the Y-axis direction and the circumferential directionof the ingot 150 by use of the X-axis direction moving mechanism 76, theY-axis direction moving mechanism 64 and the chuck table motor. As forthe depth of the production history 165, the production history 165 isspaced downward from the exfoliation layer 170 (described later) whichis formed in the exfoliation layer forming step, such that theproduction history 165 will not be removed when the exfoliation surfaceof the ingot is ground and planarized after the wafer is exfoliated fromthe ingot 150. Such a first production history forming step may becarried out, for example, in the following processing conditions.

Wavelength of pulsed laser beam: 1,064 nm

Repetition frequency: 140 kHz

Average output: 1.0 W

Pulse width: 4 ns

Diameter of focal point: 3 μm

Numerical aperture (NA) of focusing lens: 0.7

Z-axis directional position of focal point: 420 to 430 μm from uppersurface of ingot

The exfoliation layer forming step will be described referring to FIGS.17A to 18B. In the exfoliation layer forming step in the presentembodiment, first, based on the image of the ingot 150 picked up in thefirst production history forming step, the chuck table 20 is rotated bythe chuck table motor, and the X-axis direction movable plate 74 ismoved by the X-axis direction moving mechanism 76 and the Y-axisdirection movable member 62 is moved by the Y-axis direction movingmechanism 64, whereby the direction of the ingot 150 is controlled to apredetermined direction, and the positions of the ingot 150 and thefocusing device 86 on an XY plane are controlled. At the time ofcontrolling the direction of the ingot 150 to the predetermineddirection, as depicted in FIG. 17A, the first orientation flat 160 ismatched to the Y-axis direction, whereby the direction A in which theoff angle α is formed is matched to the Y-axis direction, and thedirection orthogonal to the direction A in which the off angle α isformed is matched to the X-axis direction. Next, the focusing device 86is moved in the Z-axis direction by the focal point position controlmeans, whereby the focal point FP is positioned at a depth correspondingto the thickness of the wafer to be produced firstly from the uppersurface of the ingot 150, as depicted in FIG. 17B. Subsequently, anexfoliation layer forming processing is carried out wherein a pulsedlaser beam LB of such a wavelength as to be transmitted through theingot 150 is applied through the focusing device 86 to the ingot 150,while moving the focal point FP at a predetermined feeding speedrelative to the ingot 150 in the X-axis direction matched to thedirection orthogonal to the direction A in which the off angle α isformed, by moving the X-axis direction movable plate 74 by the X-axisdirection moving mechanism 76. When the exfoliation layer formingprocessing is conducted, as illustrated in FIGS. 18A and 18B,rectilinear modified layers 166 formed by a process in which SiC isseparated into Si (silicon) and C (carbon) by application of the pulsedlaser beam LB, the pulsed laser beam LB applied next is absorbed bypreviously formed C, and SiC is thus separated into Si and C in a chainreaction manner, and cracks 168 propagating from the modified layers 166to both sides of the modified layers 166 along the c-plane, are formed.

The description will be continued referring to FIGS. 17A and 18B. In theexfoliation layer forming step, subsequent to the exfoliation layerforming processing, the Y-axis direction movable member 62 is moved bythe Y-axis direction moving mechanism 64, whereby the focal point FP isput to indexing feeding by a predetermined indexing amount Li relativeto the ingot 150 in the Y-axis direction matched to the direction A inwhich the off angle α is formed. Then, the exfoliation layer formingprocessing and the indexing feeding are repeated in the exfoliationlayer forming step, whereby a plurality of rectilinear modified layers166 extending in the direction orthogonal to the direction A in whichthe off angle α is formed are formed at intervals of the predeterminedindexing amount Li in the direction A in which the off angle α isformed, and it is ensured that the crack 168 and the crack 168 adjacentto each other in the direction in which the off angle α is formed do notoverlap each other as viewed in the vertical direction. By this,exfoliation layers 170 for exfoliating the wafer from the ingot 150,which include the pluralities of modified layers 166 and cracks 168, canbe formed at a depth corresponding to the thickness of the wafer to beproduced from the upper surface of the ingot 150. Such an exfoliationlayer forming step may be carried out, for example, in the followingprocessing conditions.

Wavelength of pulsed laser beam: 1,064 nm

Repetition frequency: 140 kHz

Average output: 14 W

Pulse width: 4 ns

Diameter of focal point: 3 μm

Numerical aperture (NA) of focusing lens: 0.7

Z-axis directional position of focal point: 300 μm from upper surface ofingot

Feeding speed of focal point: 765 mm/s

Indexing amount: 250 to 400 μm

The second production history forming step will be described referringto FIGS. 19A and 19B. In the second production history forming step,first, the position of the focusing device 86 is controlled based on theimage of the ingot 150 picked up in the first production history formingstep, after which the focusing device 86 is moved in the Z-axisdirection by the focal point position control means, whereby the focalpoint FP is positioned at a position which is on the first orientationflat 160 side and is in the inside of a peripheral surplus region not tobe formed with devices of the wafer to be produced firstly from theupper surface of the ingot 150, as illustrated in FIGS. 19A and 19B.Next, while relatively moving the ingot 150 and the focal point FPappropriately, a pulsed laser beam LB of such a wavelength as to betransmitted through the ingot 150 is applied through the focusing device86 to the ingot 150. By this, a production history 171 which can beconfigured in the form of a bar code can be formed in the inside of theperipheral surplus region not to be formed with devices of the wafer tobe produced firstly from the upper surface of the ingot 150. Like theproduction history 165 formed in the first production history formingstep, the production history 171 formed in the second production historyforming step includes any one of the lot number of the ingot 150, theorder of the wafer produced from the ingot 150, the production date ofthe wafer, the production plant of the wafer, and the wafer producingapparatus which has contributed to the production of the wafer. Whilethe production history 171 is formed along the first orientation flat160 in the present embodiment, the production history 171 may be formedin any region where devices are not formed of the wafer to be produced;for example, the production history 171 may be formed along the secondorientation flat 162, or the production history 171 may be formed alongan arcuate peripheral edge. At the time of relatively moving the ingot150 and the focal point FP in the second production history formingstep, the ingot 150 and the focal point FP can be relatively moved inthe X-axis direction, the Y-axis direction and the circumferentialdirection of the ingot 150, by use of the X-axis direction movingmechanism 76, the Y-axis direction moving mechanism 64 and the chucktable motor. As for the depth of the production history 171, theproduction history 171 is spaced upward from the exfoliation layer 170formed in the exfoliation layer forming step, such that the productionhistory 171 will not be removed when the exfoliation plane of the waferis ground and planarized after the wafer is exfoliated from the ingot150. Such a second production history forming step may be carried out,for example, in the following processing conditions.

Wavelength of pulsed laser beam: 1,064 nm

Repetition frequency: 140 kHz

Average output: 1.0 W

Pulse width: 4 ns

Diameter of focal point: 3 μm

Numerical aperture (NA) of focusing lens: 0.7

Z-axis directional position of focal point: 100 μm from upper surface ofingot

After the first production history forming step, the exfoliation layerforming step and the second production history forming step areperformed for the first ingot 150 a and the ingot carrying step and theholding step are conducted for the third ingot 150 c, the turntable 18is rotated by 90 degrees clockwise as viewed from above. By this, asdepicted in FIG. 20, the first ingot 150 a is moved to the waferexfoliation position P4, the second ingot 150 b is moved to the laserapplying position P3, and the third ingot 150 c is moved to theplanarization position P2. Then, for the first ingot 150 a, a waferproducing step (wafer exfoliation step) of exfoliating the wafer to beproduced firstly from the ingot 150, with the exfoliation layer 170 as astarting point of exfoliation, to produce the wafer is carried out bythe wafer exfoliating unit 10. In addition, for the second ingot 150 b,the first production history forming step, the exfoliation layer formingstep and the second production history forming step are performed. Onthe other hand, for the third ingot 150 c, the planarization step maynot necessarily be carried out, since the third ingot 150 c has beencarried from the ingot accommodating unit 132 and firstly positioned atthe planarization position P2 as aforementioned. Besides, for the fourthingot 150 d accommodated in the ingot accommodating unit 132, the ingotcarrying step is performed, and the holding step of holding it by thechuck table 20 positioned at the standby position P1 is conducted.

The wafer producing step will be described referring to FIGS. 9, 21A,21B and 22. In the wafer producing step in the present embodiment,first, as depicted in FIGS. 21A and 21B, the arm 92 is lowered by thearm moving mechanism 94, to put the lower end of the side wall 102 ofthe liquid tank 98 into close contact with the upper surface of thechuck table 20. Next, as illustrated in FIG. 9, the piston rod 112 b ofthe air cylinder 112 is moved, to bring the lower surface of the suctionpiece 116 into close contact with the upper surface of the ingot 150.Subsequently, the suction means connected to the suction piece 116 isoperated to generate a suction force at the lower surface of the suctionpiece 116, to cause the lower surface of the suction piece 116 to suckand hold the upper surface of the ingot 150. Next, the liquid supplymeans connected to the liquid supply section 104 is operated, to supplythe liquid 110 (for example, water) from the liquid supply section 104into the liquid accommodating space 108 until the ultrasonic vibrationgenerating member 114 is immersed in the liquid 110. Subsequently, theultrasonic vibration generating member 114 is operated to applyultrasonic vibration to the ingot 150, whereby the wafer 172 to beproduced can be exfoliated from the ingot 150, with the exfoliationlayer 170 as a starting point of exfoliation, and the wafer 172 can beproduced. Next, the arm 92 is moved upward by the arm moving mechanism94, and the liquid 110 is discharged from the liquid accommodating space108. The liquid 110 discharged from the liquid accommodating space 108is discharged to the outside of the wafer producing apparatus 2 througha discharge port 16 a (see FIG. 2) formed in the turntable accommodatingsection 16 adjacently to the wafer exfoliating unit 10. Then, asdepicted in FIGS. 21A and 21B, the piston rod 112 b of the air cylinder112 is lowered until the wafer 172 produced from the ingot 150 protrudesdownward beyond the lower end of the side wall 102 of the liquid tank98. Note that as depicted in FIG. 22, an exfoliation surface 174 of theingot 150 from which the wafer 172 has been exfoliated is rugged, andthe height of the ruggedness of the exfoliation surface 174 is, forexample, approximately 20 to 30 μm.

After the wafer producing step is performed for the first ingot 150 a, awafer carrying step of carrying the wafer 172 produced from the firstingot 150 a from the wafer exfoliating unit 10 to the waferaccommodating unit 12 is conducted by the wafer carrying unit 118. Inthe wafer carrying step, the first arm 124 is operated by the firstmotor 122 of the wafer carrying unit 118, and the second arm 128 isoperated by the second motor 126, to position the suction piece 130 ofthe wafer carrying unit 118 at a position under the wafer 172 exfoliatedby the wafer exfoliating unit 10 and sucked by the suction piece 116.Next, the lift means 120 is operated to put the upper surface of thesuction piece 130 of the wafer carrying unit 118 into close contact withthe lower surface of the wafer 172. Subsequently, the operation of thesuction means connected to the suction piece 116 of the waferexfoliating unit 10 is stopped, to release the suction force at thesuction piece 116 of the wafer exfoliating unit 10, and the suctionmeans connected to the suction piece 130 of the wafer carrying unit 118is operated to generate a suction force at the upper surface of thesuction piece 130 of the wafer carrying unit 118, thereby sucking thelower surface of the wafer 172 onto the upper surface of the suctionpiece 130 of the wafer carrying unit 118. By this, the wafer 172 istransferred from the wafer exfoliating unit 10 to the wafer carryingunit 118. Next, the first arm 124 and the second arm 128 are operated bythe lift means 120, the first motor 122 and the second motor 126,whereby the wafer 172 sucked by the suction piece 130 of the wafercarrying unit 118 can be carried from the wafer exfoliating unit 10 tothe wafer accommodating unit 12 and be accommodated in the latter. Inthe present embodiment, the wafer 172 produced from the first ingot 150a is accommodated in the first cassette 131 a, in order to make itpossible to easily distinguish from which ingot the wafer has beenproduced.

After the wafer producing step is performed for the first ingot 150 a,the wafer carrying step is conducted for the wafer 172 produced from thefirst ingot 150 a, the first production history forming step, theexfoliation layer forming step and the second production history formingstep are performed for the second ingot 150 b, and the ingot carryingstep and the holding step are conducted for the fourth ingot 150 d, theturntable 18 is rotated by 90 degrees clockwise as viewed from above. Bythis, as depicted in FIG. 23, the first ingot 150 a is moved to thestandby position P1, the second ingot 150 b is moved to the waferexfoliation position P4, the third ingot 150 c is moved to the laserapplying position P3, and the fourth ingot 150 d is moved to theplanarization position P2. Then, the wafer producing step is performedfor the second ingot 150 b, and the wafer carrying step is conducted forthe wafer 172 produced from the second ingot 150 b. In the presentembodiment, the wafer 172 produced from the second ingot 150 b isaccommodated into the second cassette 131 b. In addition, the firstproduction history forming step, the exfoliation layer forming step andthe second production history forming step are performed for the thirdingot 150 c. On the other hand, for the fourth ingot 150 d, theplanarization step may not necessarily be carried out, since the fourthingot 150 d has been carried from the ingot accommodating unit 132 andbe firstly positioned at the planarization position P2 asaforementioned. Note that the first ingot 150 a stands by at the standbyposition P1 until the turntable 18 is rotated next.

After the wafer producing step is performed for the second ingot 150 b,the wafer carrying step is conducted for the wafer 172 produced from thesecond ingot 150 b, and the first production history forming step, theexfoliation layer forming step and the second production history formingstep are performed for the third ingot 150 c, the turntable 18 isrotated by 90 degrees clockwise as viewed from above. By this, asillustrated in FIG. 24, the first ingot 150 a is moved to theplanarization position P2, the second ingot 150 b is moved to thestandby position P1, the third ingot 150 c is moved to the waferexfoliation position P4, and the fourth ingot 150 d is moved to thelayer applying position P3. Then, for the first ingot 150 a, theplanarization step of grinding the upper surface of the ingot 150 toplanarize the upper surface is carried out by the planarizing unit 6.For the third ingot 150 c, the wafer producing step is conducted, and,for the wafer 172 produced from the third ingot 150 c, the wafercarrying step is performed. In the present embodiment, the wafer 172produced from the third ingot 150 c is accommodated into the thirdcassette 131 c. For the fourth ingot 150 d, the first production historyforming step, the exfoliation layer forming step and the secondproduction history forming step are carried out. Note that the secondingot 150 b stands by at the standby position P1 until the turntable 18is rotated next.

The planarization step will be described referring to FIGS. 2 and 3. Inthe planarization step, first, the chuck table 20 holding the ingot 150from which the wafer 172 has been exfoliated is rotated by the chucktable motor at a predetermined rotating speed (for example, 300 rpm)counterclockwise as viewed from above. In addition, the spindle 40 isrotated by the motor 36 at a predetermined rotating speed (for example,6,000 rpm) counterclockwise as viewed from above. Next, the Z-axisdirection movable plate 26 is lowered by the Z-axis direction movingmechanism 28, to put the grindstones 48 into contact with theexfoliation surface 174 of the ingot 150. After the grindstones 48 areput into contact with the exfoliation surface 174, the Z-axis directionmovable plate 26 is lowered at a predetermined grinding feeding speed(for example, 1.0 μm/s) by the Z-axis direction moving mechanism 28. Bythis, the exfoliation surface 174 of the ingot 150 from which the wafer172 has been exfoliated is ground, whereby the exfoliation surface 174of the ingot 150 can be planarized to such an extent as not to hamperthe incidence of the pulsed laser beam LB in the first and secondproduction history forming steps and the exfoliation layer forming step.Note that where a thickness measuring instrument (not depicted) is putin contact with the exfoliation surface 174 of the ingot 150 at the timeof grinding and planarizing the exfoliation surface 174 of the ingot150, it is possible, upon detection of that the thickness of the ingot150 measured by the thickness measuring instrument has been reduced by apredetermined amount (for example, an amount of 20 to 30 μmcorresponding to the height of the ruggedness of the exfoliation surface174), to detect that the upper surface of the ingot 150 has beenplanarized. Besides, in the planarization step, grinding water issupplied from grinding water supply means (not depicted) to the grindingregion, during grinding of the exfoliation surface 174 of the ingot 150,and the grinding water supplied to the grinding region is discharged tothe outside of the wafer producing apparatus 2 through the dischargeport 16 b (see FIG. 2) formed in the turntable accommodating section 16adjacently to the planarizing unit 6.

After the planarization step is performed for the first ingot 150 a, thewafer producing step is conducted for the third ingot 150 c, the wafercarrying step is carried out for the wafer 172 produced from the thirdingot 150 c, and the first production history forming step, theexfoliation layer forming step and the second production history formingstep are performed for the fourth ingot 150 d, the turntable 18 isrotated by 90 degrees clockwise as viewed from above. By this, asillustrated in FIG. 25, the first ingot 150 a is moved to the laserapplying position P3, the second ingot 150 b is moved to theplanarization position P2, the third ingot 150 c is moved to the standbyposition P1, and the fourth ingot 150 d is moved to the waferexfoliation position P4. In this instance, as depicted in FIG. 4, thecleaning unit 50 is operated, the cleaning water 55 is jetted downwardfrom the jet holes of the first cleaning section 54 obliquely toward theplanarizing unit 6 side to remove grinding swarf from the first ingot150 a, and the drying air 57 is jetted downward from the jet holes ofthe second cleaning section 56 to remove the cleaning water 55 from thefirst ingot 150 a, whereby the first ingot 150 a having been planarizedby the planarizing unit 6 is cleaned and dried.

Then, for the first ingot 150 a, the first production history formingstep and the exfoliation layer forming step are conducted, but thesecond production history forming step may not be carried out, since theproduction history formed in the first production history forming stepbefore exfoliation of the wafer 172 has already been formed in the waferyet to be produced. In the first production history forming step carriedout here, the new production history 165 is formed at a deep positionfrom the upper surface of the ingot 150 as compared to the previouslyformed production history 165; in this case, in order that the pulsedlaser beam LB applied to the ingot 150 in the first production historyforming step carried out here is not intercepted by the previouslyformed production history 165, the new production history 165 is formedin such a manner as not to overlap the previously formed productionhistory 165 as viewed in the vertical direction (for example, with aspacing of approximately 50 μm from the previously formed productionhistory 165). In addition, for the second ingot 150 b, the planarizationstep is carried out. For the fourth ingot 150 d, the wafer producingstep is performed, and, for the wafer 172 produced from the fourth ingot150 d, the wafer carrying step is conducted. In the present embodiment,the wafer 172 produced from the fourth ingot 150 d is accommodated intothe fourth cassette 131 d. Note that the third ingot 150 c stands by atthe standby position P1 until the turntable 18 is rotated next.

After the planarization step, the first production history forming step,the exfoliation layer forming step, the second production historyforming step, and the wafer producing step are firstly carried out foreach of the ingots 150, the turntable 18 is rotated by 90 degreesclockwise as viewed from above, whereby the ingots 150 are sequentiallypositioned at the standby position P1, the planarization position P2,the laser applying position P3 and the wafer exfoliation position P4,then the planarization step, the first production history forming step,the exfoliation layer forming step, and the wafer producing step aresequentially repeated, and the wafer carrying step is conducted for eachwafer 172 exfoliated by the wafer exfoliating unit 10, whereby thenumber of wafers 172 which can be produced from each ingot 150 areproduced, and the produced wafers 172 are accommodated into the waferaccommodating unit 12.

In the present embodiment, after the number of wafers 172 which can beproduced from each ingot 150 are produced, a substrate recovery step canbe carried out wherein the substrate 164 on which the material of theingot 150 is slightly left is carried to an appropriate recoverycontainer 176 (see FIGS. 1 and 2) disposed on an end portion of theupper surface of the base 14 by the ingot carrying unit 134 and isrecovered. In the substrate recovery step, first, the arm 138 is movedby the arm moving mechanism 140 of the ingot carrying unit 134, toposition the suction piece 146 at a position on the upper side of thesubstrate 164 positioned at the standby position P1. Next, the suctionpiece 146 is lowered by the air cylinder 144, to put the lower surfaceof the suction piece 146 into close contact with the upper surface ofthe substrate 164. Subsequently, the suction means connected to thesuction piece 146 is operated to generate a suction force at the lowersurface of the suction piece 146, to suck the lower surface of thesuction piece 146 onto the upper surface of the substrate 146. Next, thesuction piece 146 is moved upward by the air cylinder 144, and the arm138 is moved by the arm moving mechanism 140, to position the suctionpiece 146 at a position on the upper side of the recovery container 176.Subsequently, the suction force at the suction piece 146 is released, torecover the substrate 164 into the recovery container 176. Then, theturntable is rotated and the substrate recovery step is sequentiallycarried out for the substrate 164 positioned at the standby position P1,whereby all the substrates 164 can be carried to the recovery container176 and recovered.

As has been described above, in the present embodiment, a history of thewafer 172 exfoliated from the ingot 150 is formed in the inside of thewafer 172, the history of the wafer 172 can be confirmed in the processof forming devices, so that in the case where a defect is generated in adevice, it is possible to trace back the history of the wafer 172 andinvestigate the cause of the defect of the device, leading to preventionof recurrence of the defect. In addition, the present embodimentincludes the first production history forming step of forming theproduction history in the inside of a region not formed with devices ofa wafer to be produced secondly from the upper surface of the ingotwhich has been planarized. Therefore, even after the wafer 172 isexfoliated from the ingot 150, for example, even in the case wherewafers 172 are produced from the ingot 150 but the ingot 150 is takenout of the wafer producing apparatus 2 before completion of formation ofthe number of wafers 172 which can be produced, the ingot 150 can bespecified by the production history 165 formed in the first productionhistory forming step.

Note that an example wherein the focal point FP is moved relative to theingot 150 in the direction orthogonal to the direction A in which theoff angle α is formed in the exfoliation layer forming step and whereinthe focal point FP is moved relative to the ingot 150 in the direction Ain which the off angle α is formed in the indexing feeding has beendescribed in the present embodiment. However, the direction of movementof the focal point FP relative to the ingot 150 in the exfoliation layerforming step may not necessarily be the direction orthogonal to thedirection A in which the off angle α is formed, and the direction ofmovement of the focal point FP relative to the ingot 150 in the indexingfeeding may not necessarily be the direction A in which the off angle αis formed. In addition, the wafer producing apparatus 2 may includewafer grinding means grinding the exfoliation surface of the wafer 172exfoliated from the ingot 150.

The present invention is not limited to the details of the abovedescribed preferred embodiment. The scope of the invention is defined bythe appended claims and all changes and modifications as fall within theequivalence of the scope of the claims are therefore to be embraced bythe invention.

What is claimed is:
 1. A wafer producing apparatus comprising: a holding unit adapted to hold a hexagonal single crystal ingot; a planarizing unit adapted to grind an upper surface of the hexagonal single crystal ingot held by the holding unit to planarize the upper surface; an exfoliation layer forming unit adapted to apply a laser beam of such a wavelength as to be transmitted through the hexagonal single crystal ingot to the hexagonal single crystal ingot held by the holding unit, with a focal point of the laser beam positioned at a depth corresponding to a thickness of a wafer to the produced from an upper surface of the hexagonal single crystal ingot, to form an exfoliation layer; a production history forming unit adapted to apply a laser beam of such a wavelength as to be transmitted through the hexagonal single crystal ingot to the hexagonal single crystal ingot, with a focal point of the laser beam positioned in an inside of a region not to be formed with devices of a wafer to be produced, to form a production history; a wafer exfoliating unit adapted to hold the upper surface of the hexagonal single crystal ingot and exfoliate the wafer from the exfoliation layer; and a wafer accommodating unit adapted to accommodate the exfoliated wafer. 